Atomic Layer Deposition of Al 2 O 3 on WSe 2 Functionalized by Titanyl Phthalocyanine
Park, Jun Hong, Fathipour, Sara, Kwak, Iljo, Sardashti, Kasra, Ahles, Christopher F., Wolf, Steven F., Edmonds, Mary, Vishwanath, Suresh, Xing, Huili Grace, Fullerton-Shirey, Susan K., Seabaugh, Alan,Language:
english
Journal:
ACS Nano
DOI:
10.1021/acsnano.6b02648
Date:
June, 2016
File:
PDF, 5.10 MB
english, 2016