SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - Laser pulse crystallization and optical properties of Si/SiO 2 and Si/Si 3 N 4 multilayer nano-heterostructures
Volodin, V. A., Arzhannikova, S. A., Gismatulin, A. A., Kamaev, G. N., Antonenko, A. Kh., Cherkova, S. G., Cherkov, A. G., Kochubei, S. A., Popov, A. A., Robert, S., Rinnert, H., Vergnat, M., OrlikovsVolume:
8700
Year:
2013
Language:
english
DOI:
10.1117/12.2016834
File:
PDF, 1.17 MB
english, 2013