SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II - Energy spectra of electrons emitted from samples with an internal electric field
Olesik, Jadwiga, Calusinski, Bogdan, Olesik, Zygmunt, Lowell, John K., Chen, Ray T., Mathur, Jagdish P.Volume:
2638
Year:
1995
Language:
english
DOI:
10.1117/12.221214
File:
PDF, 183 KB
english, 1995