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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Dimensional variation and roughness of LIGA-fabricated microstructures
Egert, Charles M., Wood, Robert L., Khan Malek, Chantal G., Postek, Jr., Michael T., Friedrich, Craig R.Volume:
2880
Year:
1996
Language:
english
DOI:
10.1117/12.250953
File:
PDF, 402 KB
english, 1996