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SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Design and fabrication of wireless remotely readable MEMS accelerometers
Varadan, Vijay K., Subramanian, Hareesh, Varadan, Vasundara V., Hariz, Alex, Varadan, Vijay K., Reinhold, OlafVolume:
3242
Year:
1997
Language:
english
DOI:
10.1117/12.293537
File:
PDF, 493 KB
english, 1997