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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Structures and MEMS for Optical Processing IV - Optical characteristics of GaAs MSM photodetectors flip-chip bonded upon micromirrors using micromachined conductive polymer bumps
Oh, Kwang Wook, Ahn, Chong H., Roenker, Kenneth P., Motamedi, M. Edward, Herzig, Hans PeterVolume:
3513
Year:
1998
Language:
english
DOI:
10.1117/12.324282
File:
PDF, 2.79 MB
english, 1998