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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Nd:YAG laser micromachining of SiC precision structures for MEMS
Kreutz, Ernst-Wolfgang, Weichenhain, Ruth, Horn, Alexander, Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425290
File:
PDF, 676 KB
english, 2001