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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Microfluidics and BioMEMS - High-speed electrostatic gas microvalve switching behavior
Dubois, Philippe, Guldimann, Benedikt, de Rooij, Nico F., Mastrangelo, Carlos H., Becker, HolgerVolume:
4560
Year:
2001
Language:
english
DOI:
10.1117/12.443061
File:
PDF, 290 KB
english, 2001