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SPIE Proceedings [SPIE Micro - DL tentative - San Jose, CA (Friday 1 March 1991)] Integrated Circuit Metrology, Inspection, and Process Control V - Pattern recognition approach to trench bottom-width measurement
Chou, Ching-Hua, Berman, John L., Chim, Stanley S. C., Piwonka-Corle, Timothy R., Xiao, Guoqing, Kino, Gordon S., Arnold, William H.Volume:
1464
Year:
1991
Language:
english
DOI:
10.1117/12.44431
File:
PDF, 479 KB
english, 1991