SPIE Proceedings [SPIE OPTO Ireland - Galway, Ireland (Thursday 5 September 2002)] Opto-Ireland 2002: Optics and Photonics Technologies and Applications - Fusion-bonded mutilayered SOI for MEMS applications
Cole, David, McNamara, Cormac, Somasundram, Kumar, Boyle, Anne, Devine, Claire, McKeever, James, McCann, Paul, Nevin, Andrew, Glynn, Thomas J.Volume:
4876
Year:
2003
Language:
english
DOI:
10.1117/12.463926
File:
PDF, 895 KB
english, 2003