SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Fabrication of bead-size sorting chip for chemical array sensor
Park, Byung Hwa, Park, Yoon Seok, Sohn, Young-Soo, Neikirk, Dean, Chiao, Jung-Chih, Varadan, Vijay K., Can, CarlesVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.499025
File:
PDF, 525 KB
english, 2003