SPIE Proceedings [SPIE NDE for Health Monitoring and Diagnostics - San Diego, CA (Sunday 14 March 2004)] Testing, Reliability, and Application of Micro- and Nano-Material Systems II - Carbon buffer layers for smoothing substrates of EUV and x-ray multilayer mirrors
Braun, Stefan, Meyendorf, Norbert, Baaklini, George Y., Bendjus, Beatrice, Foltyn, Thomas, Michel, Bernd, Menzel, Maik, Schreiber, Juergen, Weissbach, DannyVolume:
5392
Year:
2004
Language:
english
DOI:
10.1117/12.541365
File:
PDF, 421 KB
english, 2004