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Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces
Grundmeier, Guido, von Keudell, Achim, de los Arcos, TeresaVolume:
12
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201500087
Date:
September, 2015
File:
PDF, 3.10 MB
english, 2015