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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Polygon microlens array design and fabrication using thermal pressing in LIGA-like process
Shyu, Ruey Fang, Chiao, Jung-Chih, Jamieson, David N., Yang, Hsiharng, Ho, Chi-Ting, Faraone, Lorenzo, Dzurak, Andrew S., Hsieh, Wen-Hsiang, Weng, Feng-TsaiVolume:
5650
Year:
2004
Language:
english
DOI:
10.1117/12.581248
File:
PDF, 351 KB
english, 2004