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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Structural and electrical properties of high-κ Al2O3-ZrO2 gate dielectrics on SOI substrate
Ding, Yan F., Ye, G. S., Zhang, N. L., Zhu, Ming, Lin, Cheng L., Zhu, Ziqiang, Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.608038
File:
PDF, 327 KB
english, 2012