SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 20 January 2007)] Laser-based Micro- and Nanopackaging and Assembly - Machining hole arrays in polyimide using a UV solid state laser and predetermined temporal pulse patterns
Mullan, Claire, Pfleging, Wilhelm, Lu, Yongfeng, Ilie, Diana, O'Connor, Gerard M., Washio, Kunihiko, Bachmann, Friedrich G., Favre, Sebastian, Glynn, Thomas J., Hoving, WillemVolume:
6459
Year:
2007
Language:
english
DOI:
10.1117/12.700592
File:
PDF, 3.56 MB
english, 2007