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SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - Design and development of a microheater on GaAs for MEMS gas sensor array
Hotovy, Ivan, Becker, Thomas, Cané, Carles, Rehacek, Vlastimil, Lalinsky, Tibor, Barker, N. Scott, Hascik, Stefan, Mika, FedorVolume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.721938
File:
PDF, 567 KB
english, 2007