Dimensional and defectivity nanometrology of directed...

Physica status solidi 2015 / 03 Vol. 12; Iss. 3

Dimensional and defectivity nanometrology of directed self-assembly patterns

Simão, C., Tuchapsky, D., Khunsin, W., Amann, A., Morris, M. A., Torres, C. M. Sotomayor
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201400211
Date:
March, 2015
File:
PDF, 1.04 MB
english, 2015
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