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SPIE Proceedings [SPIE International Workshop and Conference on Photonics and Nanotechnology 2007 - Pattaya, Thailand (Sunday 16 December 2007)] ICMIT 2007: Mechatronics, MEMS, and Smart Materials - Design of the ultraprecision stage for lithography using VCM
Sasaki, Minoru, Kim, Jung-Han, Kim, Mun-Su, Choi Sang, Gisang, Li, Zushu, Oh, Min-Taek, Ikeura, Ryojun, Kim, Hyungki, Xue, FangzhengVolume:
6794
Year:
2007
Language:
english
DOI:
10.1117/12.784429
File:
PDF, 280 KB
english, 2007