SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Emerging Digital Micromirror Device Based Systems and Applications - Dynamic high-resolution patterning for biomedical, materials, and semiconductor research
Garner, Harold R., Hornbeck, Larry J., Douglass, Michael R., Joshi, Amruta, Mitnala, Sandhya N., Huebschman, Michael L., Shandy, Surya, Wallek, Brandi, Wong, SeasonVolume:
7210
Year:
2009
Language:
english
DOI:
10.1117/12.809122
File:
PDF, 1.13 MB
english, 2009