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SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2009 - Beijing, China (Wednesday 17 June 2009)] International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors - The controlling of microlens contour by adjusting developing time in the thermal reflow method
Chen, Xu-yuan, Di, Si, Du, Ru-xu, Wang, Yue-lin, Zhou, Zhi-ping, Wang, Qing-kangVolume:
7381
Year:
2009
Language:
english
DOI:
10.1117/12.833943
File:
PDF, 294 KB
english, 2009