SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Research and design on DMD digital photolithography system
Rao, Yufang, Ye, Tianchun, Han, Sen, Gao, Yiqing, Luo, Ningning, Kameyama, Masaomi, Hu, Song, He, ShuaiVolume:
7657
Year:
2010
Language:
english
DOI:
10.1117/12.865240
File:
PDF, 1.26 MB
english, 2010