SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - An AFM system with multi-mode scanning for large-area measurement
Cui, Yuguo, Ye, Tianchun, Han, Sen, He, Gaifa, Arai, Yoshikazu, Kameyama, Masaomi, Hu, Song, Gao, WeiVolume:
7657
Year:
2010
Language:
english
DOI:
10.1117/12.865476
File:
PDF, 6.98 MB
english, 2010