SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Integrated Photonics: Materials, Devices, and Applications - Development and optical characterization of vertical tapers in SiON waveguides using gray-scale lithography
Han, B., Serpengüzel, Ali, Righini, Giancarlo C., Rigo, E., Guider, R., Leipertz, Alfred, Larcheri, S., Nunzi Conti, G., Vanacharla, M. R., Chiasera, A, Ferrari, M., Pavesi, L., Pucker, G., Righini, GVolume:
8069
Year:
2011
Language:
english
DOI:
10.1117/12.886820
File:
PDF, 1.75 MB
english, 2011