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SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - Broadband optical monitoring for a 2-meter optics magnetron sputtering deposition machine

Stojcevski, Dragan, Lequime, Michel, Macleod, H. Angus, Lequime, Michel, Chauveau, Grégory, Ristau, Detlev, Torricini, Didier, Grèzes-Besset, Catherine
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Volume:
8168
Year:
2011
Language:
english
DOI:
10.1117/12.898609
File:
PDF, 519 KB
english, 2011
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