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Reevaluating the conventional approach for analyzing spectroscopic ellipsometry psi/delta versus time data. Additional statistical rigor may often be appropriate
Bagley, Jacob D., Dennis Tolley, H., Linford, Matthew R.Volume:
48
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5938
Date:
April, 2016
File:
PDF, 1.77 MB
english, 2016