SPIE Proceedings [SPIE 1982 Technical Symposium East - Arlington (Wednesday 5 May 1982)] Integrated Circuit Metrology I - Monitoring Wafer Stepper Performance With Electrical Test Structures
Mitchell, M. A., Nagaswami, V., Nyyssonen, DianaVolume:
342
Year:
1982
Language:
english
DOI:
10.1117/12.933683
File:
PDF, 191 KB
english, 1982