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SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Integrated Optical Circuit Engineering VI - Integrated Optical Circuit Grating Fabrication Using 0.25 µm Optical Lithography
Jewell, Tanya E., White, Donald L., Mentzer, Mark A.Volume:
993
Year:
1988
Language:
english
DOI:
10.1117/12.960070
File:
PDF, 3.44 MB
english, 1988