Improvement in the electrical properties of a (Ba, Sr)TiO 3 capacitor by inserting a TiN layer between polycrystalline Si and Pt bottom electrodes
Kim, Yong Tae, Lee, Chang WooVolume:
74
Language:
english
Journal:
Philosophical Magazine Part B
DOI:
10.1080/01418639608243525
Date:
September, 1996
File:
PDF, 529 KB
english, 1996