Phase map, composition and resistivity of reactively magnetron sputtered and annealed Ta–N films
Salamon, K, Radić, N, Bogdanović Radović, I, Očko, MVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/19/195301
Date:
May, 2016
File:
PDF, 1.67 MB
english, 2016