Hybrid Simulation of Duty Cycle Influences on Pulse...

Plasma Science and Technology 2016 / 04 Vol. 18; Iss. 4

Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH 4 /Ar Discharge

Wang, Xifeng, Song, Yuanhong, Zhao, Shuxia, Dai, Zhongling, Wang, Younian
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Volume:
18
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/18/4/11
Date:
April, 2016
File:
PDF, 843 KB
english, 2016
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