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Dry etching of thin chalcogenide films
Petkov, Kiril, Vassilev, Gergo, Vassilev, VenceslavVolume:
223
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/223/1/012011
Date:
April, 2010
File:
PDF, 454 KB
english, 2010