Deep sub-micron stud-via technology for superconductor VLSI...

Journal of Physics Conference Series 2014 / 05 Vol. 507; Iss. 4

Deep sub-micron stud-via technology for superconductor VLSI circuits

Tolpygo, Sergey K, Bolkhovsky, V, Weir, T, Johnson, L M, Oliver, W D, Gouker, M A
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Volume:
507
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/507/4/042043
Date:
May, 2014
File:
PDF, 1.18 MB
english, 2014
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