[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Wait-time-waste improvement opportunities and ‘smart manufacturing’ in legacy 200mm fabs
Driessen, Jan, Sjardijn, Rene, van Heukelom, Frank, van Roest, Corstian, Mom, MartijnYear:
2016
Language:
english
DOI:
10.1109/asmc.2016.7491092
File:
PDF, 970 KB
english, 2016