Mechanical Properties and Microstructural Characterization of Amorphous SiC x N y Thin Films After Annealing Beyond 1100°C
Ctvrtlik, Radim, Kulikovsky, Valeriy, Vorlicek, Vladimir, Tomastik, Jan, Drahokoupil, Jan, Jastrabik, Lubomir, Ctvrtlik, R.Volume:
99
Language:
english
Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.14057
Date:
March, 2016
File:
PDF, 1.67 MB
english, 2016