SPIE Proceedings [SPIE Measurement Technology and Intelligent Instruments - Wuhan, China (Friday 29 October 1993)] Measurement Technology and Intelligent Instruments - Grating quadrature fringe subdivision with submicron accuracy and its application in CMM
Che, Rensheng, Chen, Li-Yan, Chen, Cheng-Jun, Huang, Qingcheng, Zhu, LiVolume:
2101
Year:
1993
Language:
english
DOI:
10.1117/12.156503
File:
PDF, 122 KB
english, 1993