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SPIE Proceedings [SPIE The Hague '90, 12-16 April - The Hague, Netherlands (Thursday 1 March 1990)] Laser-Assisted Processing II - Formation of nickel silicides by excimer laser CVD of Ni(CO)4
Borsella, E., Kompa, Karl L., Reiner, H., Schroeder, Hartmut, Laude, Lucien D.Volume:
1279
Year:
1990
Language:
english
DOI:
10.1117/12.20632
File:
PDF, 465 KB
english, 1990