SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachined Devices and Components - Silicon membrane gyroscope with electrostatic actuation and sensing
Wood, David, Cooper, George, Burdess, James S., Harris, Alun J., Cruickshank, Jane L., Roop, Ray M., Chau, Kevin H.Volume:
2642
Year:
1995
Language:
english
DOI:
10.1117/12.221185
File:
PDF, 488 KB
english, 1995