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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Deposition of thick zinc oxide films with a high resistivity
Schwesinger, Norbert, Bartsch, Heike, Moeller, Frank, Markus, Karen W.Volume:
2639
Year:
1995
Language:
english
DOI:
10.1117/12.221290
File:
PDF, 803 KB
english, 1995