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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Transient thermal analysis of micromachined silicon bridge
Yuasa, Hiroyasu, Ohya, Seishiro, Karasawa, Shiro, Kodato, Setsuo, Akimoto, Kenji, Postek, Jr., Michael T., Friedrich, Craig R.Volume:
2880
Year:
1996
Language:
english
DOI:
10.1117/12.250962
File:
PDF, 403 KB
english, 1996