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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology
Smith, James H., Rodgers, M. Steven, Sniegowski, Jeffry J., Miller, Samuel L., Hetherington, Dale L., McWhorter, Paul J., Warren, Mial E., French, Patrick J., Chau, Kevin H.Volume:
3514
Year:
1998
Language:
english
DOI:
10.1117/12.323889
File:
PDF, 2.34 MB
english, 1998