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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV - Proximity effect correction for clock-rate maximization
Chen, Li, Milor, Linda, Ouyang, Charles, Maly, Wojciech P., Peng, Yeng-Kaung, Prasad, Sharad, Hartmann, Hans-Dieter, Tsujide, TohruVolume:
3510
Year:
1998
Language:
english
DOI:
10.1117/12.324395
File:
PDF, 1.73 MB
english, 1998