SPIE Proceedings [SPIE Design, Test, and Microfabrication...

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SPIE Proceedings [SPIE Design, Test,...

SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - DEM technique: a new three-dimensional microfabrication technique for nonsilicon materials

Chen, Di, Zhang, Dacheng, Ding, Guifu, Zhao, Xiaolin, Zhang, Jilin, Yang, Cunsheng, Cai, Bingchu, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus,

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Volume:

3680

Year:

1999

Language:

english

DOI:

10.1117/12.341181

File:

PDF, 1.03 MB

english, 1999

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