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SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Optical Microlithography XII - Business dynamics of lithography at very low k1 factors
Harrell, Sam, Preil, Moshe E., Van den Hove, LucVolume:
3679
Year:
1999
Language:
english
DOI:
10.1117/12.354334
File:
PDF, 2.99 MB
english, 1999