![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Materials and Device Characterization in Micromachining II - Prototyping for high-aspect-ratio MEMS by high-energy x-ray lithography using boron-carbide-based masks
Khan Malek, Chantal G., Nguyen, Steven, Vladimirsky, Yuli, Friedrich, Craig R.Volume:
3875
Year:
1999
Language:
english
DOI:
10.1117/12.360477
File:
PDF, 2.28 MB
english, 1999