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SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Micromechanical silicon precision scale
Oja, Aarne S., Sillanpaa, Teuvo, Seppae, H., Kiihamaki, Jyrki, Seppala, P., Karttunen, Jani, Riski, Kari, Courtois, Bernard, Crary, Selden B., Gabriel, Kaigham J., Karam, Jean Michel, Markus, Karen W.Volume:
4019
Year:
2000
Language:
english
DOI:
10.1117/12.382318
File:
PDF, 825 KB
english, 2000