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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol
Jang, Won-Ick, Choi, Chang-Auck, Lee, Myung-Lae, Jun, Chi-Hoon, Kim, Youn Tae, Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396426
File:
PDF, 683 KB
english, 2000