SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - MEMSMaster: a new approach to prototype MEMS
Moulinier, David, Metsu, Philippe, Brutails, Marie-Pierre, Bergeon, Stephane, Nachtergaele, Philippe, Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew A. O., WaVolume:
4408
Year:
2001
Language:
english
DOI:
10.1117/12.425365
File:
PDF, 821 KB
english, 2001