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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing - Using scanning probe microscopy and nanomoter surface profiler of DEKTAK for determination of thermal stress in quasi-monolithic integration technology (QMIT)
Joodaki, Mojtaba, Senyildiz, Teoman, Kompa, Guenter, Kassing, Rainer, Hillmer, Hartmut, Knystautas, Emile J., Kirk, Wiley P., Browning, ValerieVolume:
4468
Year:
2001
Language:
english
DOI:
10.1117/12.452550
File:
PDF, 959 KB
english, 2001