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SPIE Proceedings [SPIE Design, Process Integration, and Characterization for Microelectronics - Santa Clara, CA (Wednesday 6 March 2002)] Design, Process Integration, and Characterization for Microelectronics - SEM review and discrete inspection of optically invisible defects in a production environment
Hinschberger, Benoit, Gombar, Christine, Ithier, Laurent, Couturier, Laurent, Sherman, Boris, Rothlevi, Ofer, Ben-Porath, Ariel, Starikov, Alexander, Tobin, Jr., Kenneth W.Volume:
4692
Year:
2002
DOI:
10.1117/12.475657
File:
PDF, 855 KB
2002